Volume 08,Issue 02

Design and Modeling of a High-Acceleration MEMS G-Switch

Authors

Farzad Yadegari, Ali Mahdianikhotbesara, M. Hossein Sehhat

Abstract
Due to widespread advances in various industries and new technologies, micro-electro mechanical systems (MEMS) systems have increased in today’s world. Applications of MEMS are typically in the production of electromechanical consequences with high production efficiency and volume and the lower production costs. In this paper, the design, modeling, and a detailed production process of a prototype of a high acceleration MEMS G-switch are discussed. The system configuration of this switch is equivalent to traditional sensors of the same class, consisting of a proof mass handled by four cantilever beams. The proposed model has the ability to respond to accelerations in the range of 0 to 100g (low-g levels) and tolerance to mechanical failure up to 30,000g (high-g levels) acceleration. In order to simulate and evaluate the performance of the designed sensor, COMSOL Multiphysics finite element analysis software has been used. The results show that the proposed model can be constructed due to its simple structure.

Keyword: Acceleration, MEMS, G-switch, COMSOL, Finite element analysis.

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